Diffraction-limited X-Ray Nanobeam with KB Mirrors
Kazuto Yamauchi1, Hidekazu Mimura1, Satoshi Matsuyama1, Hirokatsu Yumoto1, Soichiro han da1, Yasuhisa Sano1, Kazuya Yamamura1, Kenji Tamasaku2, Yoshinori Nishino2, Makina Yabashi3, Tetsuya Ishikawa2
1Osaka University
2SPring-8/RIKEN
3SPring-8/JASRI
X-ray focusing using a Kirkpatrick-Baez setup with two total reflection mirrors is a promising method, allowing highly efficient and energy-tunable focusing. Fabricated mirrors having a figure accuracy of 1 nm peak-to-valley height gave ideal diffraction-limited focusing of hard X-rays. The focal size, defined as the full width at half maximum of the intensity profile, was 36 nm × 48 nm at an X-ray energy of 15 keV. Recently, we have achieved a 25 nm focal size, using a short-focal-length mirror.
Fluorescence X-ray microscopy with KB mirrors was also developed, targeting cell biological applications. The distribution of various elements in a single cell was successfully observed with high resolution.
Our next main project is the realization of sub-10 nm level hard X-ray focusing. At-wavelength metrology is being developed, in which a phase-retrieval simulator is coded for the determination of phase errors on mirror surfaces from the only intensity profiles of a focused beam. A Multilayer deposition system is also being prepared.
Observation
of Se Distribution in a cell by
fluorescence X-ray microscopywith KB
mirrors.
